发明名称 |
Compact microcolumn for automated assembly |
摘要 |
A microcolumn including an assembly substrate and a plurality of beam modification components. The assembly substrate includes a plurality of sockets, and the beam modification components each include a connector coupled to a corresponding one of the sockets. Assembly of the beam modification components to the assembly substrate may employ automation and/or automated calibration, including automated motion of robotic stages in a substantially automated manner.
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申请公布号 |
US7081630(B2) |
申请公布日期 |
2006.07.25 |
申请号 |
US20040799836 |
申请日期 |
2004.03.12 |
申请人 |
ZYVEX CORPORATION |
发明人 |
SAINI RAHUL;JANDRIC ZORAN |
分类号 |
G01K1/08;H01J3/14;H01J3/26;H01J37/04;H01J37/067;H01L21/44;H05K1/00 |
主分类号 |
G01K1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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