发明名称 |
Interference measuring probe |
摘要 |
A method and a device for measuring at least one test surface and a reference test surface having an interference measuring probe which emits a first measuring beam which is aligned with respect to the reference test surface, are described. The measuring probe emits at least one second measuring beam, which is aligned with respect to at least the at least one test surface.
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申请公布号 |
US7081825(B2) |
申请公布日期 |
2006.07.25 |
申请号 |
US20040761483 |
申请日期 |
2004.01.20 |
申请人 |
BREIDER DOMINIQUE;DUVOISIN MARC-HENRI;MARCHAL DOMINIQUE;THOMINET VINCENT |
发明人 |
BREIDER DOMINIQUE;DUVOISIN MARC-HENRI;MARCHAL DOMINIQUE;THOMINET VINCENT |
分类号 |
G08B21/00;G01B9/02 |
主分类号 |
G08B21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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