| 摘要 |
PROBLEM TO BE SOLVED: To provide a standard calibrated leak capable of solving the problems of a conventional art wherein the leak amount of the standard calibrated leak must be measured via other device and the measuring range of the leak amount is narrow. SOLUTION: The standard calibrated leak comprises a thin film that cannot pass measuring gas, and a permeation hole of the predetermined number of divisions formed in the thin film. The permeation hole has a predetermined aperture, and its aperture is within a nano range. The standard calibrated leak previously determines the dimension and the number of divisions, and the aperture is within the nano range. Therefore, the leak amount is calculated, based on the theory of vacuum science technology, namely the leak amount can be determined without using the other device, and a micro leak amount can be measured. COPYRIGHT: (C)2006,JPO&NCIPI
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