| 摘要 |
Comb capacitive accelerometer comprising a substrate ( 5 ), a first electrode free to move ( 2 ) with respect to the said substrate ( 5 ) provided with a set of mobile fingers ( 7 ), a first electrode ( 4 A, 4 B) fixed with respect to the said substrate ( 5 ) and provided with a set of fixed fingers ( 8 A, 8 B), each of the mobile fingers ( 7 ) being arranged between two contiguous fixed fingers ( 8 A, 8 B) so as to form a first microstructure with interdigitised combs ( 20 ), accelerometer in which at least one second mobile electrode ( 40 ) associated with at least one second fixed electrode ( 42 ) to form at least one second microstructure with interdigitised combs ( 22 ) superposed on the first microstructure with interdigitised combs ( 20 ). According to the invention, the said second mobile electrode ( 40 ) and the said second fixed electrode ( 42 ) are etched in the same substrate ( 5 ) as the said first mobile electrode ( 2 ) and the said first fixed electrode ( 4 ).
|
