ULTRASONIC INSPECTION METHOD AND ULTRASONIC INSPECTION DEVICE

摘要

An opening in the bottom surface of a medium tank (1) is closed with a polymer film (2)(a), the polymer film (2) is stuck to the bottom of the medium tank (1) by reducing the pressure of the inside (4) of the medium tank (1) (b), an ultrasonic wave transmission medium (5) is injected while reducing the pressure of the inside (4) of the medium tank (1) so that at least the distal end of an ultrasonic probe (3) is immersed (c), the inside of the medium tank (1) is pressurized while keeping an inspection object (6) in contact with the polymer film (2) by moving the inspection object (6) and the medium tank (1) relatively (d), an ultrasonic wave transmitted from the ultrasonic probe (3) and reflected by the inspection object is received by the ultrasonic probe (3), and the inspection object is inspected. The polymer film can be replaced easily during production process and good inspection can be expected even if there is no space around the inspection object.