发明名称 NONVOLATILE SEMICONDUCTOR MEMORY DEVICE, MANUFACTURING METHOD THEREFOR, WRITING METHOD THEREFOR, READING METHOD THEREFOR, AND RECORDING MEDIUM AND SEMICONDUCTOR MEMORY DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To easily and surely adjust the amount of charge capture and prevent inconveniences, such as faulty information from occurring in storing desired multi-valued information. <P>SOLUTION: A semiconductor memory device is configured, with a charge capture film 5 being arranged, composed of the sequential lamination of a gate oxide film 11, silicon nitride film 12, silicon oxide film 13, silicon nitride film 14, silicon oxide film 15, silicon nitride film 16, and silicon oxide film 17, between a channel region C located between a source region 3 and drain region 4, and a gate electrode 6. Here, by accumulating charges in traps, existing between each nitride film 12, 14, 16 and its lower layer, and each of the oxide films 11, 13, 15, 17, information of four values ("00", "01", "10", "11") is stored. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p>
申请公布号 JP2006191130(A) 申请公布日期 2006.07.20
申请号 JP20060034476 申请日期 2006.02.10
申请人 PEGRE SEMICONDUCTORS LLC 发明人 MIURA HIROTOMO;SATO YASUO
分类号 H01L21/8247;G11C16/02;G11C16/04;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8247
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