LASER RADIATION DEVICE, LASER RADIATING METHOD AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a laser radiation device capable of forming a linear beam spot by a short light path length or capable of forming the linear beam spot whose length in the long side direction is long and capable of solving the problem of the deviation of focusing positions at both ends in the linear direction. SOLUTION: The laser radiation device is provided with an optical system for forming a laser beam emitted from a laser oscillator into a linear beam spot having a long side direction and a short side direction. In the optical system, a long side direction focusing cylindrical lens is arranged between the first short side direction focusing cylindrical lens and the second short side direction focusing cylindrical lens whereby the deviation of positions of an uniform surface is generated in the long side direction focusing cylindrical lens so as to make a distance from the uniform surface to the second short side direction focusing cylindrical lens constant without depending on the angle of view. COPYRIGHT: (C)2006,JPO&NCIPI