发明名称 |
Apparatus and method for balancing and for providing a compliant range to a test head |
摘要 |
A load, such as an electronic test head, is supported. A force sensor detects a force received from the load, the force resulting from the load being imbalanced such that a torque is created about a rotational axis of the load. A source of force provides a counter force relative to the load in response to the force detected by the force sensor. A method of docking an electronic test head held in a test head manipulator to an electronic device handler is also provided. The method of docking includes measuring a magnitude of an imbalance force along or about at least one of a plurality of motion axes of the test head manipulator; and providing a counter force to the imbalance force.
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申请公布号 |
US2006156836(A1) |
申请公布日期 |
2006.07.20 |
申请号 |
US20060376584 |
申请日期 |
2006.03.15 |
申请人 |
NY NIL O;AKOUKA HENRI M;HOLT ALYN R |
发明人 |
NY NIL O.;AKOUKA HENRI M.;HOLT ALYN R. |
分类号 |
G01D21/00;G01M99/00;G01R31/26;G01R31/28;H01L21/66 |
主分类号 |
G01D21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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