发明名称 INSPECTION METHOD AND ITS DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To reduce an analysis time and to improve the analysis accuracy by improving a user interface. <P>SOLUTION: This device comprises an image pickup apparatus for photographing a plurality of images in a workpiece; a storage means for storing the pickup images picked by the image pickup apparatus; and a displaying means having a first area for displaying the plurality of pickup images stored in the storage means and a plurality of second areas classifying the images according to the feature of the pickup images. This device comprises an analysis unit constituted so as to move the plurality of pickup images from the first area to the second areas on the screen and classify the plurality of pickup images on the second areas. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006189462(A) 申请公布日期 2006.07.20
申请号 JP20060073725 申请日期 2006.03.17
申请人 HITACHI LTD 发明人 IKEDA YOKO;KONISHI JIYUNKO;IWATA HISAFUMI;TAKAGI YUJI;OBARA KENJI;NAKAGAKI AKIRA;ISOGAI SHIZUSHI;OZAWA YASUHIKO
分类号 G01N21/956;G06T1/00;H01L21/66 主分类号 G01N21/956
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