发明名称 |
INSPECTION METHOD AND ITS DEVICE |
摘要 |
<P>PROBLEM TO BE SOLVED: To reduce an analysis time and to improve the analysis accuracy by improving a user interface. <P>SOLUTION: This device comprises an image pickup apparatus for photographing a plurality of images in a workpiece; a storage means for storing the pickup images picked by the image pickup apparatus; and a displaying means having a first area for displaying the plurality of pickup images stored in the storage means and a plurality of second areas classifying the images according to the feature of the pickup images. This device comprises an analysis unit constituted so as to move the plurality of pickup images from the first area to the second areas on the screen and classify the plurality of pickup images on the second areas. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
申请公布号 |
JP2006189462(A) |
申请公布日期 |
2006.07.20 |
申请号 |
JP20060073725 |
申请日期 |
2006.03.17 |
申请人 |
HITACHI LTD |
发明人 |
IKEDA YOKO;KONISHI JIYUNKO;IWATA HISAFUMI;TAKAGI YUJI;OBARA KENJI;NAKAGAKI AKIRA;ISOGAI SHIZUSHI;OZAWA YASUHIKO |
分类号 |
G01N21/956;G06T1/00;H01L21/66 |
主分类号 |
G01N21/956 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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