发明名称 |
MEASURING DEVICE, MEASURING SYSTEM, AND METHOD FOR MEASURING DISTANCE TO OBJECT |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and system that can make an air gauge operate always at an advantageous standoff and can perform measurement so as to maximize the performance and useful measuring range. <P>SOLUTION: The system includes the air gauge configured to detect the distance to a surface of the object and a sensor configured to measure at least one from the group including a relative position of the air gauge and a relative position of the surface of the object. Outputs of the air gauge and the sensor are combined to produce a combined air gauge reading. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
申请公布号 |
JP2006189429(A) |
申请公布日期 |
2006.07.20 |
申请号 |
JP20050362149 |
申请日期 |
2005.12.15 |
申请人 |
ASML HOLDING NV |
发明人 |
GALBURT DANIEL N;GAJDECZKO BOGUSLAW F |
分类号 |
G01B13/12;G01B21/00;H01L21/027 |
主分类号 |
G01B13/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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