发明名称 MEASURING DEVICE, MEASURING SYSTEM, AND METHOD FOR MEASURING DISTANCE TO OBJECT
摘要 <P>PROBLEM TO BE SOLVED: To provide a method and system that can make an air gauge operate always at an advantageous standoff and can perform measurement so as to maximize the performance and useful measuring range. <P>SOLUTION: The system includes the air gauge configured to detect the distance to a surface of the object and a sensor configured to measure at least one from the group including a relative position of the air gauge and a relative position of the surface of the object. Outputs of the air gauge and the sensor are combined to produce a combined air gauge reading. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006189429(A) 申请公布日期 2006.07.20
申请号 JP20050362149 申请日期 2005.12.15
申请人 ASML HOLDING NV 发明人 GALBURT DANIEL N;GAJDECZKO BOGUSLAW F
分类号 G01B13/12;G01B21/00;H01L21/027 主分类号 G01B13/12
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