| 发明名称 |
THIN FILM PIEZOELECTRIC RESONATOR AND METHOD FOR MANUFACTURING THIN FILM PIEZOELECTRIC RESONATOR |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thin film piezoelectric resonator which is improved in resonating characteristics, and suppresses the deterioration of high frequency characteristics. <P>SOLUTION: This thin film piezoelectric resonator is provided with: a first metallic film 21 on a substrate 11; an amorphous metallic film 22 on the first metallic film 21; a second metallic film 23 oriented on the amorphous metallic film 22 in a direction vertical to the surface of the amorphous metallic film 22; and a piezoelectric film 15 oriented on the second metallic film 23 in a direction vertical to the surface of the second metallic film 23. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
| 申请公布号 |
JP2006191356(A) |
申请公布日期 |
2006.07.20 |
| 申请号 |
JP20050001346 |
申请日期 |
2005.01.06 |
| 申请人 |
TOSHIBA CORP |
发明人 |
SHIBATA HIRONOBU;SANO KENYA |
| 分类号 |
H03H9/17;H01L41/09;H01L41/18;H01L41/22;H01L41/332;H03H3/02 |
主分类号 |
H03H9/17 |
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