发明名称 ALIGNING SYSTEM FOR TRAY AND TRAY HOLDER
摘要 PROBLEM TO BE SOLVED: To provide an aligning system for a tray and a tray holder that has a vertical tray in which connecting holes are formed and a holder plate in which connecting arms engaged to the connecting holes are formed, and prevents the tray and tray holder from being bent. SOLUTION: The aligning system comprises the tray 100 where a substrate and a mask can be stuck and a plurality of connecting holes 110 having connecting projections are formed and are transported vertically; the connecting arms 210 which is to be inserted in the connecting holes 110 so as to be connected to the tray 100 and on which connecting grooves to be engaged to the connecting projections in the state of the connecting arms being inserted in the connecting holes 110; and the tray holder 200 including the holder plate 290 on which the connecting arms 210 are provided. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006191038(A) 申请公布日期 2006.07.20
申请号 JP20050370955 申请日期 2005.12.22
申请人 SAMSUNG SDI CO LTD 发明人 JUNG SUNG WHA;HAN SANG JIN;KANG EU GENE
分类号 H01L21/683;C23C14/12;C23C14/24;C23C14/50;C23C14/56;H01L21/673 主分类号 H01L21/683
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