| 摘要 |
PROBLEM TO BE SOLVED: To provide a shadow mask frame assembly equipped with heat dissipation and cooling functions for improving position accuracy of a pattern of an organic electroluminescence element by suppressing thermal expansion of a shadow mask. SOLUTION: The shadow mask frame assembly comprises the shadow mask 20 on which the pattern is formed, and a mask frame 10 with a part thereof to which the shadow mask 20 adheres and which is exposed to an deposition source 70 on which a cooling plate is mounted. COPYRIGHT: (C)2006,JPO&NCIPI |
