| 摘要 |
PROBLEM TO BE SOLVED: To fix a mask having a predetermined pattern formed thereon to a mask frame without damaging the pattern. SOLUTION: A mask frame 15 on which a mask having a pattern area and a mask edge defining the pattern area is fixed comprises: a through opening 15a corresponding to the pattern area; and a base 15b corresponding to the mask edge. The base is provided with discharging holes formed therein, and a vacuum pump is coupled to the discharging holes 15c so that the mask is fixed to the mask frame without damaging the pattern formed on the pattern area of the mask. In the above configuration, the mask edge faces to the base of the mask frame, and air existing between the mask edge and the base is exhausted through the discharging holes installed in the base of the mask frame with a vacuum adsorption method. Thereby, the mask closely contacts with the mask frame. COPYRIGHT: (C)2006,JPO&NCIPI
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