| 摘要 |
PROBLEM TO BE SOLVED: To provide a photoelectric converter, suppressing sensitivity deterioration or variety in sensitivity between pixels. SOLUTION: The photoelectric converter is provided with a plurality of photo detectors formed on a substrate, an interlayer film formed on a layer upper from the photo detectors, a high refractive index region provided so as to correspond to the photo detector and having a refractive index higher than that of the interlayer film, and a layer formed between the photo detectors and the high refractive index region and having a low etching speed ratio with respect to the interlayer film while the layer having the low etching speed ratio is constituted so as to be formed to cover at least the whole of surfaces of the photo detectors. Further, the layer having the low etching speed ratio is provided with a refractive index between that of the high refractive index region and that of the substrate. COPYRIGHT: (C)2006,JPO&NCIPI
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