| 摘要 |
PROBLEM TO BE SOLVED: To sense accurately a needle trace present on a pad included in the wiring pattern formed on a substrate, after so contacting a probe with the pad as to perform an electric inspection. SOLUTION: In a needle-trace sensor, a multi-gradational objective image indicating the region including a pad present on a substrate is acquired by a photographing portion. Also, a pad region indicating the pad is acquired from the objective image by a pad-region acquiring portion 42 of a processor 4. Further, with respect to a needle-trace-region acquiring portion 43 in a plurality of divided regions obtained by dividing thereinto the pad region of the objective image, the needle-trace threshold of the divided region present near the edge of the pad region is set to such a value that it is more approximate to the picture-element value of the outside region of the pad region than the needle-trace threshold of the divided region present in the central portion of the pad region. While doing in this way, the needle-trace thresholds are set individually for the respective divided regions. Moreover, the picture-element values of the pad region of the objective image are brought into binary values by altering the needle-trace threshold every divided region. Consequently, the effect of the obscureness present near the edge of the pad region which is caused by the edge of the pad of the objective image is so suppressed as to be able to acquire the needle-trace threshold properly. As a result, the needle trace present on the pad can be sensed accurately. COPYRIGHT: (C)2006,JPO&NCIPI
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