摘要 |
PROBLEM TO BE SOLVED: To provide a radiation detector capable of suppressing a crosstalk generated by a scintillator, and improving a resolution. SOLUTION: Flatness of the surface state of a flattened layer 3 on a photodiode 6 upper domain constituting a pixel is heightened, and flatness of the surface state of a flattened layer 3 on an upper part of a boundary domain with an adjacent pixel is lowered. Hereby, crystallinity of the scintillator 4 wherein a crystal is grown up on an upper part of the flattened layer 3 is lowered on an upper part of a pixel boundary domain in comparison with the photodiode 6 upper domain, to thereby reduce the quantity of light entering the adjacent pixel. COPYRIGHT: (C)2006,JPO&NCIPI
|