发明名称 RADIATION DETECTOR AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a radiation detector capable of suppressing a crosstalk generated by a scintillator, and improving a resolution. SOLUTION: Flatness of the surface state of a flattened layer 3 on a photodiode 6 upper domain constituting a pixel is heightened, and flatness of the surface state of a flattened layer 3 on an upper part of a boundary domain with an adjacent pixel is lowered. Hereby, crystallinity of the scintillator 4 wherein a crystal is grown up on an upper part of the flattened layer 3 is lowered on an upper part of a pixel boundary domain in comparison with the photodiode 6 upper domain, to thereby reduce the quantity of light entering the adjacent pixel. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006189296(A) 申请公布日期 2006.07.20
申请号 JP20050000723 申请日期 2005.01.05
申请人 KONICA MINOLTA HOLDINGS INC 发明人 ISHIDA KOICHI;MASUDA SATOSHI
分类号 G01T1/20;H01L27/14;H01L29/786;H01L31/09;H04N5/321 主分类号 G01T1/20
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