发明名称 Non-volatile electrically alterable memory cell for storing multiple data and manufacturing thereof
摘要 A memory cell that includes two control gates disposed laterally between two floating gates where each floating gate is capable of holding data. The memory cell is formed by placing a first polysilicon on a substrate of semiconductor material, on which a well is placed. The control gates are preferably formed by a Damascene process, in which a first polysilicon is removed after forming two floating gates, and a second polysilicon is placed between these two floating gates. An anisotropic etching is later done on the second polysilicon to form two control gates.
申请公布号 US2006157773(A1) 申请公布日期 2006.07.20
申请号 US20050036911 申请日期 2005.01.14
申请人 YU ANDY T;GO YING W 发明人 YU ANDY T.;GO YING W.
分类号 H01L29/76 主分类号 H01L29/76
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