| 摘要 |
PROBLEM TO BE SOLVED: To provide a holder for a treated object, a treatment apparatus and a ceramic susceptor for semiconductor device manufacturing apparatus having high reliability. SOLUTION: The holder for a treated object 12 holds the treated object, and comprises a ceramics base body 13 which has electrical circuits 3a, 3b, 14 and 15, and where a screw hole is formed, anchoring members 22 and 25 fixed by being screwed into the screw hole of the ceramics base body 13, and power feed conductive members 4, 17 and 18 which are connected to the anchoring members 22 and 25 and electrically connected to the electrical circuits 3a, 3b, 14 and 15. COPYRIGHT: (C)2006,JPO&NCIPI |
