| 摘要 |
PROBLEM TO BE SOLVED: To provide a paste coating machine which is capable of accurately measuring and inspecting the application status of an imaged paste pattern at high speed. SOLUTION: The paste coating machine is provided with a light source 23 to radiate spot light to the imaged paste pattern PP on a substrate 24 so that the paste pattern PP of the desired profile is imaged on the substrate 24 by changing the relative position relationship between the substrate 24 and a nozzle 13a while discharging the paste within a paste storing tube 13 from the discharging port of the nozzle 13a on the substrate 24 and then the relative position relationship to the substrate 24 together with the nozzle 13a is changed by a supporting plate 15 of the nozzle 13a, an image recognition means 22 of the spot light projected area so that the slit light crosses the paste pattern PP on the substrate 24 by irradiation and further an image processing means 17g to gain the height of the paste pattern by using the image of the spot mark from the image obtained by the image recognition means 22. COPYRIGHT: (C)2006,JPO&NCIPI
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