<p>The model-based method tests compliance of production devices with the performance specifications of a device design. The production devices are manufactured in accordance with the device design by a manufacturing process. In the method, a simple model form based on the device design and the performance specifications is developed (212), a stimulus for testing the production devices is specified (214) and each production device is tested (220). The model form has a basis function and model form parameters for the basis function. The model form parameters are dependent on the manufacturing process and differ in value among the production devices. A production device is tested by measuring (222) the response of the production device to the stimulus; extracting (224), using the model form, the values of the model form parameters for the production device from the measured response and the stimulus; and checking (226) compliance of the production device with the performance specifications using the extracted values of the model form parameters.</p>
申请公布号
WO2006076117(A2)
申请公布日期
2006.07.20
申请号
WO2005US45278
申请日期
2005.12.14
申请人
AGILENT TECHNOLOGIES, INC.
发明人
KHOCHE, AJAY;TUFILLARO, NICHOLAS, B.;JEFFERSON, STANLEY, T.;BARFORD, LEE, A.