发明名称 APPARATUS AND METHOD FOR MANUFACTURING CRYSTAL
摘要 <P>PROBLEM TO BE SOLVED: To manufacture a low-dislocation single crystal which can sufficiently stand use as an optical element material, by suppressing generation of dislocation in the grown crystal. <P>SOLUTION: A crystal manufacturing apparatus for growing a single crystal from a raw material of a crystalline substance has a crucible 110 having a first chamber 114 wherein a seed crystal SC is placed and a second chamber 113 wherein the raw material is placed and a first member 117 which is placed inside the second chamber and has a through-hole that opens into the first and second chambers. The first member has a certain shape so that a first force it receives from a molten raw material in the direction of the first chamber becomes larger than a second force it receives in the direction of the second chamber. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006188371(A) 申请公布日期 2006.07.20
申请号 JP20040381891 申请日期 2004.12.28
申请人 CANON INC 发明人 MICHIGUCHI KENTARO
分类号 C30B11/00;C30B29/12;G03F7/20;H01L21/027 主分类号 C30B11/00
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