APPARATUS FOR MEASURING FILM SPECTRAL PROPERTY

摘要

PROBLEM TO BE SOLVED: To measure film properties for providing a photocell where sensitivity is increased in the blue and UV spectral region.

SOLUTION: This apparatus for measuring film spectral property comprises a means for supplying monochromatic light; a means for chopping the monochromatic light; a means for converging the monochromatic light on a sample which is a substrate having the film to be analyzed on its surface; a means for coupling the sample to a first photodetector on the film side through immersion oil and converging the light radiated by the sample on the second photodetector; and a means for analyzing the signals from the first photodetector and the second photodetector and obtaining a desired film spectrum property.

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