| 摘要 |
PROBLEM TO BE SOLVED: To reduce a contact fail in a thin-film transistor causing a point defect and a line defect although it is extremely difficult to eliminate the point and line defects completely in the thin-film transistor in an active matrix type liquid crystal display. SOLUTION: The thin-film transistor comprises a first contact hole reaching a source region 309 or a drain region provided in an interlayer insulating film 314; a second contact hole reaching a gate electrode 308 provided in the interlayer insulating film 314; and wiring formed in the first and second contact holes 321, 322 each. In the wiring, a first titanium film 401, aluminum or a film 402 with aluminum as a main component, and a second titanium film 404 are laminated, and aluminum or the film with aluminum as a main constituent has an element for giving fluidity to aluminum or the film with aluminum as a main constituent, thus reducing a contact fail. COPYRIGHT: (C)2006,JPO&NCIPI
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