| 摘要 |
PROBLEM TO BE SOLVED: To provide a slit coater comprising a pre-ejecting unit that minimizes the amount of a washing liquid to be used and improves the washing effectiveness of a roller by separating the coating liquid deposited on the roller of the pre-ejecting unit from the washing liquid using a coating liquid separation unit, and a method for manufacturing a liquid crystal display device utilizing it. SOLUTION: The slit coater comprises a table on which an object to be processed is mounted, a slit nozzle that coats a coating liquid onto a surface of the object to be processed, a pre-ejecting unit wherein the coating liquid remaining in the slit nozzle is pre-ejected from the slit nozzle, and a coating liquid separation unit that separates the pre-ejected coating liquid from a washing liquid and discharges the pre-ejected coating liquid thus separated. COPYRIGHT: (C)2006,JPO&NCIPI
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