发明名称 Kerf with improved fill routine
摘要 A semiconductor disk which exhibits chip areas arranged next to one another and separated from one another by a kerf. The chip areas in each case exhibit a multiplicity of similar device patterns, such that at least one fill area with fill patterns is arranged in the kerf, and the fill patterns in the kerf and the device patterns in the chip areas are essentially similarly constructed.
申请公布号 US2006157702(A1) 申请公布日期 2006.07.20
申请号 US20060334754 申请日期 2006.01.19
申请人 INFINEON TECHNOLOGIES AG 发明人 SUKMAN-PRAHOFER SIBINA;LACHENMANN SUSANNE;ROSSKOPF VALENTIN;WINTER RAMONA
分类号 H01L23/58;H01L21/66 主分类号 H01L23/58
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