PIEZOELECTRIC RESONATOR AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To realize a piezoelectric resonator which is small in insertion loss, and which is high in frequency selectivity by using a piezoelectric film having high crystallinity and excellent flatness in a piezoelectric resonator using an acoustic mirror.

SOLUTION: A first acoustic mirror material 12 constituted of silicon oxide and a second acousto mirror material 13 constituted of tungsten are alternately laminated in six cycles on a substrate 11 so that an acousto mirror 14 can be formed. A lower electrode 16 constituted of a first adhesive layer 31 and a second adhesive layer 32 constituted of gold is formed on the acoustic mirror 14, and an adhesive face 19 is formed between the first adhesive layer 31 and the second adhesive layer 32. A piezoelectric film 23 constituted of aluminum nitride is formed on the lower electrode 16, and an upper electrode 24 constituted of molybdenum is formed on the piezoelectric film 23.

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