发明名称 MANUFACTURING METHOD FOR THIN-FILM TRANSISTOR
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method for a thin-film transistor avoiding a dimensional change by applying a heat and having stable characteristics by a simple process, as a productive efficiency is left as it is held during a process in which a gate electrode and source-drain electrodes are formed. SOLUTION: In the manufacturing method for the thin-film transistor, the gate electrode is formed on either surface of a film as a gate insulating film and the source-drain electrodes 30 on a surface different from the surface by the printing of a solution or a dispersion in which a conductive material is dissolved by an organic solvent. The manufacturing method has a process in which the pattern shape of either one electrode is printed on one surface of the film by the solution or the dispersion; and the process in which the solution or the dispersion in the pattern shape of the previously printed electrode is dried under a vacuum, the organic solvent is volatilized, and the electrode is formed. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006190922(A) 申请公布日期 2006.07.20
申请号 JP20050096733 申请日期 2005.03.30
申请人 TOPPAN PRINTING CO LTD 发明人 NAKAMURA RYUICHI;KINO OSAMU
分类号 H01L21/336;H01L21/288;H01L29/786 主分类号 H01L21/336
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