| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method of manufacturing in which a thin film is formed in a flexible substrate with high adhesiveness without raising a manufacturing cost without the necessity for using an adhesive being a trouble for the microfabrication of wiring in order to form the thin film in the flexible substrate and to make as the flexible printed substrate and further in which neither wrinkle nor curling, etc. is generated in the obtained flexible printed substrate. SOLUTION: In the apparatus of manufacturing the flexible printed substrate to form a metal thin film layer in a vacuum tub at the flexible substrate top, the vacuum tub has a plasma treatment means, a sheet layer forming means, a metal thin film layer forming means, and a heating rolling means sequentially in order in the conveyance direction of the above flexible substrate. The sheet layer forming means and the thin film layer forming means are provided along the circumferential direction of a main roller for winding the flexible substrate and conveying it and heating the flexible substrate. COPYRIGHT: (C)2006,JPO&NCIPI
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