| 摘要 |
PROBLEM TO BE SOLVED: To provide a pulsed gas laser generator, having high repetition pulse oscillation and generating an output laser beam, having a circular cross section and uniform distribution of intensity. SOLUTION: In the pulsed gas laser generator, a cathode 25, a cylindrical electrical discharge tube 21 made of an insulator for forming a main electrical discharge path and an anode 24 are arranged in a line, in this order, medium gas is enclosed inside, a pair of mirrors 22 and 23 are arranged outside the cathode 25 and the anode 24 to form an optical resonator, and a first power unit 27 is provided for applying main discharge voltage between the cathode 25 and the anode 24 further. A cylindrical dielectric member 40 and a supplementary electrode 41 are provided near either or both of the cathode 25 and the anode 25. A second power unit 28 for applying voltage to the supplementary electrode 41 is provided, so that a plasma electrode is formed in the inner side region of the cylindrical dielectric member 40 at operations. COPYRIGHT: (C)2006,JPO&NCIPI |
