摘要 |
PROBLEM TO BE SOLVED: To enable a characteristic test in a low-cost and simple constitution in DUT having weak drive capability of a transmission line. SOLUTION: An impedance conversion circuit 90 is connected between the transmission line 70 and DUT 10 in an input and output circuit 80 of a semiconductor test device 1. The impedance conversion circuit 90 is composed of: a resistor (first resistor Rtp81-1 and second resistor Rts81-2); a 2-input and 1-output analog calculator (first analog calculator 82-1 and second analog calculator 82-2) for outputting a voltage obtained from subtraction by making the voltage from one end of the resistor prescribed times and subtracting the voltage of the other end of the resistor from the voltage making the prescribed times; and a buffer (first buffer 83-1 and second buffer 83-2) for outputting an output signal of the analog calculator by low impedance. The output of DUT 10 is output by the low impedance to drive the transmission line 70. COPYRIGHT: (C)2006,JPO&NCIPI
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