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发明名称
LAGEREINRICHTUNG
摘要
申请公布号
DE50207136(D1)
申请公布日期
2006.07.20
申请号
DE20025007136
申请日期
2002.11.21
申请人
ORTNER CLS GMBH
发明人
BUDACH, KARSTEN;ESSER, MARTIN;JARNIG, HUBERT
分类号
H01L21/00;H01L21/677
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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