| 摘要 |
<P>PROBLEM TO BE SOLVED: To uniformize a pattern matching precision in the same shot region. <P>SOLUTION: BOX marks BX1 and BX2 are arranged at a plurality of positions on a scribe line SC in the same shot region SH, matching position of the BOX marks BX1 and BX2 arranged at a plurality of positions is measured, an amount of offset of a stepper at the time of exposing the shot region SH is set according to the measurements, and stepper positioning control is made at the time of exposing the shot region SH according to the amount of offset thus set. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
