| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a standard calibrated leak. SOLUTION: The manufacturing method of the standard calibrated leak comprises a step of preparing a substrate; a step of forming a thin film as a catalyst having a predetermined pattern on the substrate; a step of growing a one-dimensional nano structure of a predetermined dimension and the number of divisions in the catalyst layer; a step of forming a second thin film on the substrate in which the one-dimensional nano structure is grown; and a step of removing the one-dimensional nano structure on the second thin film, forming a permeation hole of the same dimension as that of the one-dimensional nano structure in the second thin film, and forming the standard calibrated leak. The leak amount is determined sufficiently by the standard calibrated leak, so that problems of the conventional art can be solved. COPYRIGHT: (C)2006,JPO&NCIPI |
