METHOD OF MONITORING CURVATURE OF MICRO LENS ON IN-LINE

摘要

PROBLEM TO BE SOLVED: To provide a curvature monitoring method of a micro lens of an image sensor which measures the diameter of a circle of a top view image of the micro lens by variously changing the focus with an optic scope, and can calculate the curvature of the micro lens on the in-line. SOLUTION: The curvature monitoring method comprises a step of focusing the scope to the uppermost part of the micro lens and measuring the diameter or region of a first circle; a step of focusing the scope to a part lower than the upper part of the micro lens and measuring the diameter or region of a second circle; and a step of calculating the curvature of the micro lens using the measured diameters or regions of the first circle and the second circle. COPYRIGHT: (C)2006,JPO&NCIPI