SEMICONDUCTOR DEVICE, TESTER, AND MEASUREMENT METHOD

摘要

PROBLEM TO BE SOLVED: To accurately measure delay time caused by wiring provided in the interior of a semiconductor device. SOLUTION: This semiconductor device is for measuring delay time caused by the wiring under measurement provided in the interior. The semiconductor device comprises: a loop course with the wiring provided on the course; a delay element for delaying an input signal by a prescribed time period; a delay choice part for choosing whether to connect the delay element onto the loop course or not; a loop delay measurement part for measuring delay time caused by the loop course; a first gate delay calculation part for calculating delay time caused by the delay element by subtracting the delay time caused by the loop course when the delay element is not connected onto the loop course from the delay time caused by the loop course when the delay element is connected onto the loop course; a second gate delay calculation part for calculating delay time caused by a logic circuit connected onto the loop course, based on the delay time caused by the delay element; and a wiring delay calculation part for calculating delay time caused by the wiring. COPYRIGHT: (C)2006,JPO&NCIPI