TRANSPARENT ELECTRODE AND METHOD FOR FABRICATING SAME

摘要

Disclosed is an indium-free transparent electrode which is excellent in alkali resistance, wet heat stability and etching properties. Specifically disclosed is a transparent electrode mainly containing zinc oxide and tin oxide wherein the taper angle at the edge portion of the electrode is 30-89°. The ratio of zinc atoms to the total of zinc atoms and tin atoms in the transparent electrode (Zn/(Zn + Sn) atomic ratio) is preferably within the range of 0.5-0.9.