| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film transistor array substrate in which a thin film transistor is protected without requiring a protective film while preventing the electrolytic corrosion of a pad, and to provide its manufacturing method. SOLUTION: In the thin film transistor array substrate, a thin film transistor is protected without requiring a protective film, the number of masks can be decreased, manufacturing cost can be reduced, and electrolytic corrosion caused by the opening of a data pad can be prevented by forming the data pad of the jumping structure of a gate metal pattern and a data metal pattern. Its manufacturing method is also provided. COPYRIGHT: (C)2006,JPO&NCIPI |
