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发明名称
Versiegelte Poren in Damascene-Strukturen mit Low-k-Material
摘要
申请公布号
DE112004001530(T5)
申请公布日期
2006.07.20
申请号
DE200411001530
申请日期
2004.08.18
申请人
INFINEON TECHNOLOGIES AG
发明人
KIM, SUN OO
分类号
H01L21/768
主分类号
H01L21/768
代理机构
代理人
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