| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a lithographic apparatus which can be used by combining with (E)UV radiation. <P>SOLUTION: A method of performing an inclined focal test including each step of generating a target object, a projection beam for irradiation, at least one reflective device, and a projection beam for first projected irradiation on the target object by using at least one reflective device in a first direction, comprises steps of: providing a second projection beam with an inclination against the first projection beam by using an inclination device for inclining at least one reflective device in a second direction; generating a projection beam of a second projected irradiation on the target object; determining the lateral movement of the first and second projected projection beams on the target object; and determining the focal deviation of the target object against the projected projection beams from the lateral movement. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
