| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To form a furthermore miniaturized accelerometer, concerning a capacitive accelerometer based on a micromachined comb. <P>SOLUTION: This comb-shaped capacitive accelerometer is equipped with a substrate 5, the first movable electrode 2 and the first fixed electrodes 4A, 4B. Hereby, the first microstructure 20 comprising interdigitised combs is formed. The accelerometer is also equipped with at least one second microstructure 22 comprising interdigitised combs, constituted of the second movable electrode 40 and the second fixed electrode 42. The second microstructure 22 is arranged on an overlapped position relative to the first microstructure 20. In the accelerometer, the second movable electrode 40 and the second fixed electrode 42 are formed by etching on the same substrate as the first movable electrode 2 and the first fixed electrodes 4. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
