摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thin film transistor array substrate in which a thin film transistor is protected without requiring a protective film while reducing manufacturing cost, and to provide its manufacturing method. <P>SOLUTION: The thin film transistor array substrate comprises a gate electrode connected with a gate line, a source electrode connected with a data line intersecting the gate line to define a pixel region, a drain electrode opposing the source electrode through a channel, a semiconductor layer forming a channel between the source electrode and the drain electrode, a pixel electrode located in the pixel region and formed in contact with the drain electrode, a channel protective film formed on the channel of the semiconductor layer, a gate pad provided with a gate pad lower electrode extended from the gate line, and a data pad provided with a data pad lower electrode formed separately from the data line. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |