| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning electron microscope in which an image focused over the whole sample image is obtained, and in which the two-dimensional image can be acquired without blurring all over the image. SOLUTION: This is a charged particle beam device which is provided with a means which changes a focus of the charged particle beam emitted from a charged particle source, with a charged particle detector which detects the charged particle beam obtained at an irradiation place of the charged particle beam of the sample, and with a means which composes the two-dimensional image of the sample as viewed from the direction of a charged particle beam source based on a signal of a part where the charged particle beam is put into focus out of signals outputted from the charged particle detector. COPYRIGHT: (C)2006,JPO&NCIPI
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