| 摘要 |
PROBLEM TO BE SOLVED: To easily inspect a connection part of a semiconductor device in an environment test. SOLUTION: This inspection system is provided with a resistance circuit network 4 connected to connection terminal parts, a constant current device 5, and a voltage monitoring device 6. In the resistance circuit network 4, a resistance value estimated from an observation point P is varied in response to short-circuiting release in every of the connection terminal parts to identify the released connection terminal part. The constant current device 5 is connected to the observation point P to supply a prescribed current to the observation point P. The voltage monitoring device 6 is connected to the observation point P, and measures a change in a voltage value in the observation point P to determine the released connection terminal part. Each of the connection terminal parts of the semiconductor device under the condition put into an environment test vessel 9 is connected to the constant current device 5 and the voltage monitoring device 6 by two wires (one thereof is a grounding wire) via the resistance circuit network 4. COPYRIGHT: (C)2006,JPO&NCIPI
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