| 摘要 |
PROBLEM TO BE SOLVED: To enhance work efficiency as to inspection on the shape, size, etc. of an object. SOLUTION: When the object which is an inspecting object is placed on an XYZ stage 20, an optical image of the object is let in a light receiving part of a CCD-type camera provided in a head part 14 via a hollow part 24 and an effective lens 26 of an LED optical device 22. The camera converts the optical image let in the receiving part into an electric signal. The electric signal obtained by the conversion is input via a personal computer 18 into a display 32. An enlarged reflection of the body, as it were, a body image, is thereby displayed on a display screen of the display 32. Further, a drawing of the object is displayed by the personal computer 18 so as to be superposed on the object image. Accordingly, it is made possible to perform inspection while comparing the object image with the drawing, enhancing work efficiency. COPYRIGHT: (C)2006,JPO&NCIPI
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