| 摘要 |
PROBLEM TO BE SOLVED: To implement accurate measurement of substrate temperature and substrate temperature distributions by a temperature measuring apparatus of a simple constitution and provide a semiconductor device of satisfactory quality by using the temperature measuring apparatus. SOLUTION: A light source 21 irradiates a semiconductor substrate 2 with light. A photo-detector 22 detects its scattering light. A spectrum analyzer 24 performs spectral analysis on the detected scattering light. A temperature operation part 25a computes the temperature of the semiconductor substrate 2 on the basis of the size of a band gap of the semiconductor substrate 2 acquired from analyses results. COPYRIGHT: (C)2006,JPO&NCIPI
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