| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection method, capable of simply and precisely discriminating that a film layer has been formed on the whole surface of a base material as a whole, having the film layer applied to its surface. SOLUTION: A predetermined inspection liquid is adhered to the inspection region of the surface, having the film layer formed thereto of a base material composed of a base material body and the film layer formed to the surface of the base material body and the inspection region, to which the inspection liquid has been adhered, is irradiated with light to detect the difference between the quantities of the lights reflected by or transmitted, through the respective parts of the inspection region. By this constitution, the degree of adhesion of the inspection liquid to the base material is measured, to discriminate presence of the film layer formed on the base material body. COPYRIGHT: (C)2006,JPO&NCIPI
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