| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for measuring deposition thickness by which deposition thickness on a substrate is accurately converted from a deposition rate of an organic gaseous material effused from a vertically moving deposition source, and to provide a deposition system using the same. SOLUTION: The method for measuring the deposition thickness includes: sensing a deposition rate of a material effused from the deposition source 20 to the substrate 30, the sensing being conducted by a deposition rate measuring sensor 26; transmitting the sensed deposition rate to a controller; and calculating the deposition thickness on the substrate 30 using a conversion formula that employs the sensed deposition rate and the life value of the deposition rate measuring sensor 26 as parameters. COPYRIGHT: (C)2006,JPO&NCIPI
|
