| 摘要 |
PROBLEM TO BE SOLVED: To provide a sealing system for a drive shaft of a vapor deposition source in a vapor deposition system, which prevents an organic gas-phase substance spouted from the vapor deposition source from spreading in a vacuum chamber and depositing on a drive shaft for vertically moving the vapor deposition source, in a vertically moving type apparatus for vapor-depositing organic matter on a substrate getting bigger, and to provide the vapor deposition system having the same. SOLUTION: The drive shaft of the vapor deposition source in the deposition chamber system comprises: a connecting part which is connected to the drive shaft installed in the vacuum chamber of the deposition chamber system; a support plate which is connected to the connecting part through a joint and supports the vapor deposition source for spouting the organic gas-phase substance in the vacuum chamber; a support having a penetration port opened in the joint; a beam which surrounds the drive shaft, and of which the one face is opened so that the support can move along the drive shaft; and a shielding plate which can move in the penetration port. The vapor deposition system has the drive shaft. COPYRIGHT: (C)2006,JPO&NCIPI
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