发明名称 Transistor of volatile memory device with gate dielectric structure capable of trapping charges and method for fabricating the same
摘要 The present invention relates to a transistor of a volatile memory device with gate dielectric structure capable of trapping charges and a method for fabricating the same. The transistor in a cell region of a volatile memory device includes a substrate of a first conductive type; a gate dielectric structure capable of trapping charges and formed on the substrate; a gate formed on the gate dielectric structure; a gate insulation layer formed on the gate; a source/drain of a second conductive type formed in a predetermined region of the substrate disposed beneath each lateral side of the gate; and a channel ion implantation region of the first conductive type formed in a predetermined region of the substrate disposed beneath the gate.
申请公布号 US2006157755(A1) 申请公布日期 2006.07.20
申请号 US20060375792 申请日期 2006.03.14
申请人 LEE SANG-DON;KIM YIL-WOOK;AHN JIN-HONG;PARK YOUNG-JUNE 发明人 LEE SANG-DON;KIM YIL-WOOK;AHN JIN-HONG;PARK YOUNG-JUNE
分类号 H01L27/10;H01L29/76;G11C11/401;H01L21/265;H01L21/28;H01L21/314;H01L21/336;H01L21/822;H01L21/8238;H01L21/8242;H01L21/8246;H01L27/108;H01L29/51;H01L29/78;H01L29/792 主分类号 H01L27/10
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